Title : WIDE WIDTH COMPLEX COATING APPARATUS AND PROCESS EMPLOYING ELECTROMAGNETIC AND ULTRASONIC WAVE
Status
Patented
Part
Mech/Metal
Conditon
Licensing
Estimated Cost
0 US$
Title: WIDE WIDTH COMPLEX COATING APPARATUS AND PROCESS EMPLOYING ELECTROMAGNETIC AND ULTRASONIC WAVE; and COMPOSITE COATING APPARATUS FOR WIDE AREA ULTRASONIC COATING AND SPIN COATING AND COATING METHOD THEREOF CAPABLE OF PREVENTING AIR TRAPPING IN FINE PATTERN AND REDUCING DEFECTIVE PROPORTION
Summary of the technology ㅇ This technology relates to a wide width ultrasonic spray coating process, which can replace a spin-coating process used to coat a sensitizing solution, an etchant, an ITO coating agent, etc. on a semiconductor wafer or a display substrate, and a wide width ultrasonic wave and electromagnetic complex process and a fabrication apparatus thereof, in which sprayed particles are electrified and spray particles electrified by an adequate electromagnetic field is coated on a to-be-coated material to a more uniform thickness in order to effectively improve the efficiency of the process.
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